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Rigaku, Tohoku University Target Next-Generation X-Ray Metrology for Semiconductors

EE Times Asia·2026/9/1 23:18:32🔗 原文

📌 概要

New research institute will combine soft X-ray capabilities, information science and industrial expertise to advance semiconductor metrology. The post Rigaku, Tohoku University Target Next-Generatio

⚡ 关键要点

  • New research institute will combine soft X-ray capabilities,
  • The post Rigaku, Tohoku University Target Next-Generation X-

New research institute will combine soft X-ray capabilities, information science and industrial expertise to advance semiconductor metrology.

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